Photonics

Symmetry-protected bound states in the continuum (BICs) support high-quality factor (Q) resonances. As a result, realizing tunable devices based on these states requires approaches that break the symmetry. Tunable mode leakage in terahertz BIC metasurfaces is demonstrated through structural symmetry breaking of an in-plane mirror symmetry. Specifically, a leaky quasi-BIC mode is created through the introduction of lateral asymmetry of the in-plane resonator geometry and through asymmetric out-of-plane tilting using MEMS cantilever actuation. This provides fine-tuned and reconfigurable control of the radiative leakage. Although out-of-plane deformation can, in principle, induce a BIC-to-quasi-BIC transition, the study focuses on quasi-BIC-to-quasi-BIC modulation in order to clearly demonstrate leakage control and to facilitate modal analysis. Experimental measurements supported with full-wave simulations and coupled-mode theory (CMT) reveal distinct leakage and mode behavior for in-plane and out-of-plane symmetry breaking. Importantly, control experiments using symmetrically tilted cantilevers confirm that radiative leakage to the far-field arises from symmetry breaking rather than deformation alone. The dual symmetry-breaking approach enables control over radiative and intrinsic loss through in-plane and out-of-plane symmetry breaking, providing a robust and scalable route toward reconfigurable high-Q terahertz metasurfaces.

Diatom exoskeletons, known as frustules, exhibit a unique multilayer structure that has attracted considerable attention across interdisciplinary research fields as a source of biomorphic inspiration. These frustules possess a hierarchical porous structure, ranging from millimeter-scale foramen pores to nanometer-scale cribellum pores. In this study, this natural template for nanopattern design is leveraged to showcase metamaterials that integrates perfect absorption and subwavelength color printing. The cribellum-inspired hierarchical nanopatterns, organized in a hexagonal unit cell with a periodicity of 300 nm, are realized through a single-step electron beam lithography process. By employing numerical models, it is uncovered that an additional induced collective dipole mode is the key mechanism responsible for achieving outstanding performance in absorption, reaching up to 99%. Analysis of the hierarchical organization reveals that variations in nanoparticle diameter and inter-unit-cell distance lead to shifts and broadening of the resonance peaks. It is also demonstrated that the hierarchical nanopatterns are capable of color reproduction with high uniformity and fidelity, serving as hexagonal pixels for high-resolution color printing. These cribellum-inspired metamaterials offer a novel approach to multifunctional metamaterial design, presenting aesthetic potential applications in the development of robotics and wearable electronic devices, such as smart skin or surface coatings integrated with energy harvesting functionalities.

Bound states in the continuum (BIC) are a non-radiative state embedded in a continuous spectrum of radiating waves. BICs have emerged as a promising platform for opto-electronic phenomena that are dependent on high quality factors. However, the quality factor of metallic metamaterial-based BICs is limited due to ohmic loss, even at terahertz frequencies. As an alternative, we investigate active all-silicon BIC terahertz metamaterials. Quasi-BIC states can be realized either through structurally symmetry breaking or by changing the incident angle of the terahertz waves, as verified with coupled mode theory (CMT). Samples fabricated using micromachining techniques were characterized using terahertz time domain spectroscopy revealing good agreement with simulations. Moreover, we investigated optical tuning of the quasi-BIC response using low-fluence (< 25 µJ/cm²) excitation with 1.5 eV pulses. The dynamic response is consistent with full-wave electromagnetic simulations and indicate that all-silicon metamaterials are a viable active BIC platform with potential applications including terahertz sensing and terahertz nonlinear lightwave phenomena.

Bound states in the continuum (BIC) is an exotic concept describing systems without radiative loss. BICs are widely investigated in optics due to numerous potential applications including lasing, sensing, and filtering, among others. This study introduces a structurally tunable BIC terahertz metamaterial fabricated using micromachining and experimentally characterized using terahertz time domain spectroscopy. Control of the bending angle of the metamaterial by thermal actuation modifies the capacitance enabling tuning from a quasi-BIC state with a quality factor of 26 to the BIC state. The dynamic response from the quasi-BIC state to the BIC state is achieved by blueshifting the resonant frequency of the LC mode while maintaining a constant resonant frequency for the dipole mode. Additional insight into the tunable electromagnetic response is obtained using temporal coupled mode theory (CMT). The results reveal the effectiveness of bi-layer cantilever-based structures to realize tunable BIC metamaterials with potential applications for nonlinear optics and light-matter control at terahertz frequencies.

One route to create tunable metamaterials is through integration with “on-demand” dynamic quantum materials, such as vanadium dioxide (VO₂). This enables modalities to create high-performance devices for historically challenging applications. Indeed, dynamic materials have often been integrated with metamaterials to imbue artificial structures with some degree of tunability. Conversely, metamaterials can be used to enhance and extend the natural tuning range of dynamic materials. Utilizing a complementary split-ring resonator array deposited on a VO₂ film, we demonstrate enhanced terahertz transmission modulation upon traversing the insulator-to-metal transition (IMT) at approximately 340 K. Our complementary metamaterial increases the modulation amplitude of the original VO₂ film from 0.42 to 0.68 at 0.47 THz upon crossing the IMT, corresponding to an enhancement of 62%. Moreover, temperature-dependent transmission measurements reveal a significant redshift of the resonant frequency in a narrow temperature range where phase coexistence is known to occur. Neither Maxwell-Garnett nor Bruggeman effective medium theory adequately describes the observed frequency shift and amplitude decrease. However, a Drude model incorporating a significant increase of the effective permittivity does describe the experimentally observed redshift. Our results highlight that symbiotic integration of metamaterial arrays with quantum materials provides a powerful approach to engineer emergent functionality.

Metasurface absorbers are of particular interest in numerous photonic applications including detectors, photovoltaic cells, and emissivity coatings. We introduce a thin membrane silicon metasurface absorber with periodic elliptical holes that, as demonstrated theoretically and experimentally, achieves very high absorption (~90%) over a ~500 GHz bandwidth at normal incidence. Based on the analysis of the effective medium theory, the broadband absorption is attributed to proximal electric and magnetic dipole resonances. The absorption amplitude can also be tuned by ~20% with above-gap photoexcitation. Due to the unit cell geometry, the carrier density on the top surface and sidewalls of the membrane must be taken into account. Our dynamic membrane silicon metasurface absorber is notably thin and CMOS-compatible, providing a promising platform to realize compact terahertz devices including detectors, modulators, and switches.

During the past decade, metasurfaces have shown great potential to complement standard optics, providing novel pathways to control the phase, amplitude, and polarization of electromagnetic waves utilizing arrays of subwavelength resonators. We present dynamic surface wave (SW) switching at terahertz frequencies utilizing a mechanically reconfigurable metasurface. Our metasurface is based on a microelectromechanical system (MEMS) consisting of an array of micro-cantilever structures, enabling dynamic tuning between a plane wave (PW) and a SW for normal incidence terahertz radiation. This is realized using line-by-line voltage control of the cantilever displacements to achieve full-span 2π phase control. Full-wave electromagnetic simulations and terahertz time-domain spectroscopy agree with coupled mode theory, which was employed to design the metasurface device. A conversion efficiency of nearly 60% has been achieved upon switching between the PW and SW configurations. Moreover, a nearly 100 GHz working bandwidth is demonstrated. The MEMS-based control modality we demonstrate can be used for numerous applications, including but not limited to terahertz multifunctional metasurface devices for spatial light modulation, dynamic beam steering, focusing, and beam combining, which are crucial for future “beyond 5G” communication systems.

Compared with the traditional electric and magnetic multipoles, the existence of a dynamic toroidal moment has received increasing interest in recent years. This is due to its novel electromagnetic response, including dynamic non-radiating charge-current configurations and non-reciprocal interactions. Reconfigurable terahertz metamaterials where artificial toroidal metamolecules and traditional microelectromechanical systems bi-material cantilever structures are integrated within the same unit cell are presented. Through modification of the bending angle by thermal actuation, the toroidal dipole intensity increases by five orders of magnitude in the out-of-plane direction with an overall increase in the toroidal intensity of nearly an order of magnitude. Terahertz time-domain spectroscopy is used to determine the evolution of the transmission as a function of the bending angle. This enables numerical confirmation of the toroidal response using multipole decomposition with additional confirmation provided by phase analysis. The results demonstrate the use of bi-material cantilevers to realize a tunable toroidal moment with potential applications in sensing and next-generation communication technologies.

We present a polarization-insensitive air-spaced triple-band metamaterial perfect absorber (MMPA), consisting of a metamaterial layer and metallic ground plane operating at terahertz frequencies. Three near-unity absorption peaks can be individually determined by the geometry of the ring resonators within one unit cell, since the inter-unit-cell coupling is negligible. However, for sufficiently small interlayer spacing (<~20 µ⁢m), coupling between the metamaterial layer and the ground plane is non-negligible. Therefore, near-field interactions must be taken into account for a full understanding of the electromagnetic response (EMR). Interference theory is often used to model the EMR of MMPAs analytically, in which interlayer coupling between the metamaterial and ground plane is usually neglected, resulting in a predicted blueshift of the absorption peaks in comparison to experiment. To account for near-field coupling, we incorporate correction terms into the analytical interference model by taking into account the effective interlayer capacitance and inductance. This results in good agreement between interference theory and experiment (and full-wave numerical simulations). Our findings demonstrate that interlayer coupling is an important design parameter for ultrathin MMPAs.

The concept of “bound states in the continuum” (BIC) describes an idealized physical system exhibiting zero radiative loss composed, for example, of an infinitely extended array of resonators. In principle, vanishing of radiative losses enables an infinitely high-quality factor and corresponding infinite lifetime of the resonance. As such, BIC inspired metasurfaces and photonic designs aim to achieve superior performance in various applications including sensing and lasing. We describe an analytical model based on temporal coupled mode theory to realize an “accidental” (i.e., parameter-tuned) Friedrich–Wintgen BIC. Further, we experimentally verify this model with measurements of quasi-BICs in a metallic terahertz metasurface (MS) and the corresponding complementary metasurface (CMS) using terahertz time domain spectroscopy. For the MS and CMS structures, quality factors of ~20 are achieved, limited by non-radiative intrinsic loss in the materials. Our results reveal that Babinet’s principle qualitatively holds for the MS and CMS quasi-BIC structures. In addition, ultra-high electric and magnetic field enhancement MS and CMS structures, respectively, are presented.

Detecting low energy photons, such as photons in the long-wave infrared range, is a technically challenging proposition using naturally occurring materials. In order to address this challenge, we herein demonstrate a micro-bolometer featuring an integrated metamaterial absorber (MA), which takes advantage of the resonant absorption and frequency selective properties of the MA. Importantly, our micro-bolometer exhibits polarization insensitivity and high absorption due to a novel metal-insulator-metal (MIM) absorber design, operating at 8-12 µm wavelength. The metamaterial structures we report herein feature an interconnected design, optimized towards their application to micro-bolometer-based, long-wave infrared detection. The micro-bolometers were fabricated using a combination of conventional photolithography and electron beam lithography (EBL), the latter owing to the small feature sizes within the design. The absorption response was designed using the coupled mode theory (CMT) and the finite integration technique, with the fabricated devices characterized using Fourier-transform infrared spectroscopy (FTIR). The metamaterial-based micro-bolometer exhibits a responsivity of approximately 198 V/W over the 8-12 µm wavelength regime, detectivity of ~ 0.6 × 109 Jones, thermal response time of ~ 3.3 ms, and a noise equivalent temperature difference (NETD) of ~33 mK under 1mA biasing current at room-temperature and atmosphere pressure. The ultimate detectivity and NETD are limited by Johnson noise and heat loss with thermal convection through air; however, further optimization could be achieved by reducing the thermal conductivity via vacuum packaging. Under vacuum conditions, the detectivity may be increased in excess of two-fold, to ~ 1.5 × 109 Jones. Finally, an infrared image of a soldering iron was generated using a single-pixel imaging process, serving as proof-of-concept of this detection platform. The results presented in this work pave the road towards high-efficiency and frequency-selective detection in the long-wave infrared range through the integration of infrared MAs with micro-bolometers.

Manipulating the phase of electromagnetic radiation is of importance for applications ranging from communication to imaging. Here, real-time reconfigurable phase response and group delay of a tunable terahertz metamaterial consisting of dual-layer broadside coupled split-ring resonators is demonstrated. Utilizing electrostatic comb-drive actuators, the metamaterial resonant frequency is tuned by changing the lateral distance between the two layers which modifies the transmission amplitude and phase spectrum. The phase modulation is approximately 180° in the vicinity of the resonant frequency. In addition, remarkable modulation in the group delay of transmitted pulses (from –7 to 3 ps) is evaluated based on the measured frequency response using the convolution method when the lateral distance is changed from 0 to 24 µ⁢m. A two-port resonator model, derived from coupled-mode theory and supported by finite-element full-wave simulations, reveals the underlying physics of the modulation. Specifically, the coupling factor between the two layers plays a critical role, the tuning of which provides a route for structure design and optimization. The capability of tuning the phase response and group delay enables applications, such as phase compensation and group-delay equalization at terahertz frequencies.

Diatoms are photosynthetic algae that exist ubiquitously throughout the planet in water environments. Over the preceding decades, the diatom exoskeletons, termed frustules, featuring abundant micro- and nanopores, have served as the source material and inspiration for myriad research efforts. In this work, it is demonstrated that frustule-inspired hierarchical nanostructure designs may be utilized in the fabrication of metamaterial absorbers, thereby realizing a broadband infrared (IR) absorber with excellent performance in terms of absorption. In an effort to investigate the origin of this absorption characteristic, numerical models are developed to study these structures, revealing that the hierarchical organization of the constituent nanoparticulate metamaterial unit cells introduce an additional resonance mode to the device, broadening the absorption spectrum. It is further demonstrated that the resonant peaks shift linearly as a function of inter-unit-cell spacing in the metamaterial, which is attributed to the induced collective dipole mode by the nanoparticles. Ultimately, the work herein represents an innovative perspective in terms of the design and fabrication of IR absorbers inspired by naturally occurring biomaterials, offering the potential to lead to advances in metamaterial absorber technology.

Electromagnetic metamaterials, which are a major type of artificially engineered materials, have boosted the development of optical and photonic devices due to their unprecedented and controllable effective properties, including electric permittivity and magnetic permeability. Metamaterials consist of arrays of subwavelength unit cells, which are also known as meta-atoms. Importantly, the effective properties of metamaterials are mainly determined by the geometry of the constituting subwavelength unit cells rather than their chemical composition, enabling versatile designs of their electromagnetic properties. Recent research has mainly focused on reconfigurable, tunable, and nonlinear metamaterials towards the development of metamaterial devices, namely, metadevices, via integrating actuation mechanisms and quantum materials with meta-atoms. Microelectromechanical systems (MEMS), or microsystems, provide powerful platforms for the manipulation of the effective properties of metamaterials and the integration of abundant functions with metamaterials. In this review, we will introduce the fundamentals of metamaterials, approaches to integrate MEMS with metamaterials, functional metadevices from the synergy, and outlooks for metamaterial-enabled photonic devices.

Terahertz perfect absorbers represent an essential photonic component for detecting, modulating, and manipulating terahertz radiation. We utilize single-layer H-shaped all-silicon arrays to demonstrate tunable ultra-broadband terahertz wave absorption. Experiment and simulation reveal near unity absorption at 1 THz, with a bandwidth of ~913 GHz for ≥90% absorbance. The absorption is optically tunable, exhibiting a resonance frequency blueshift by 420 GHz, while the peak absorbance remains over 99%. The dynamic response upon optical excitation depends on the penetration depth of the pump beam in silicon, as demonstrated through simulations that take into account the depth dependence of the carrier concentration in the all-silicon metamaterial perfect absorber. Notably, our all-silicon and ultrabroadband metamaterial perfect absorber is compatible with CMOS processing, potentially facilitating the development of terahertz detectors. Furthermore, the demonstrated tunable response may find potential applications toward creating dynamic functional terahertz devices, such as modulators and switches.

A typical metamaterial perfect absorber (MPA) is comprised of a metamaterial layer, a dielectric spacer, and a ground plane. The conventional spacer material is usually a lossy dielectric with little-dispersion for the purpose of easing the design and optimization procedure of the MPA. In this paper, we present the design, fabrication, and characterization of metamaterial perfect absorbers with a highly dispersive spacer, which is compatible with functional microelectromechanical systems. The measured dispersive permittivity of a silicon nitride thin film is used in modeling the absorption response of MPAs with rigorous coupled wave analysis. Different designs of MPA structures are fabricated and characterized. Spectroscopy data shows two perfect absorption peaks in wavelengths ranging from 8 µm to 20 µm, which supports the theoretical calculation and numerical simulation. The dispersion of silicon nitride enables the shared resonant modes of the two peak wavelengths and decreases the wavelength shift led by variations in structural parameters. We demonstrate that the use of dispersive dielectric materials in MPAs potentiates various functional devices.

Dynamic polarization control of light is essential for numerous applications ranging from enhanced imaging to material characterization and identification. We present a reconfigurable terahertz metasurface quarter-wave plate consisting of electromechanically actuated microcantilever arrays. Our anisotropic metasurface enables tunable polarization conversion through cantilever actuation. Specifically, voltage-based actuation provides mode-selective control of the resonance frequency, enabling real-time tuning of the polarization state of the transmitted light. The polarization tunable metasurface has been fabricated using surface micromachining and characterized using terahertz time domain spectroscopy. We observe a ~230 GHz cantilever actuated frequency shift of the resonance mode, sufficient to modulate the transmitted wave from pure circular polarization to linear polarization. Our CMOS-compatible tunable quarter-wave plate enriches the library of terahertz optical components, thereby facilitating practical applications of terahertz technologies.

Metamaterial absorbers typically consist of a metamaterial layer, a dielectric spacer layer, and a metallic ground plane. We have investigated the dependence of the metamaterial absorption maxima on the spacer layer thickness and the reflection coefficient of the metamaterial layer obtained in the absence of the ground plane layer. Specifically, we employ interference theory to obtain an analytical expression for the spacer thickness needed to maximize the absorption at a given frequency. The efficacy of this simple expression is experimentally verified at terahertz frequencies through detailed measurements of the absorption spectra of a series of metamaterials structures with different spacer thicknesses. Using an array of split-ring resonators (SRRs) as the metamaterial layer and SU8 as the spacer material we observe that the absorption peaks redshift as the spacer thickness is increased, in excellent agreement with our analysis. Our findings can be applied to guide metamaterial absorber designs and understand the absorption peak frequency shift of sensors based on metamaterial absorbers.

We present a detailed analysis of the conditions that result in unity absorption in metamaterial absorbers to guide the design and optimization of this important class of functional electromagnetic composites. Multilayer absorbers consisting of a metamaterial layer, dielectric spacer, and ground plane are specifically considered. Using interference theory, the dielectric spacer thickness and resonant frequency for unity absorption can be numerically determined from the functional dependence of the relative phase shift of the total reflection. Further, using transmission line theory in combination with interference theory we obtain analytical expressions for the unity absorption resonance frequency and corresponding spacer layer thickness in terms of the bare resonant frequency of the metamaterial layer and metallic and dielectric losses within the absorber structure. These simple expressions reveal a redshift of the unity absorption frequency with increasing loss that, in turn, necessitates an increase in the thickness of the dielectric spacer. The results of our analysis are experimentally confirmed by performing reflection-based terahertz time-domain spectroscopy on fabricated absorber structures covering a range of dielectric spacer thicknesses with careful control of the loss accomplished through water absorption in a semiporous polyimide dielectric spacer. Our findings can be widely applied to guide the design and optimization of the metamaterial absorbers and sensors.

We present a three-dimensional terahertz metamaterial perfect absorber (MPA) that exhibits a high quality factor and is polarization insensitive. The unit cell is composed of two orthogonally oriented copper stand-up split ring resonators deposited on a copper ground plane with capacitive gaps in free space away from the substrate. Near unity (99.6%) absorption at ~1.65 THz is experimentally obtained in excellent agreement with simulation results. The quality factor is ~37, which is quite large for a terahertz MPA because of reduced material losses in the all-metal structure. According to simulation results, the MPA is insensitive to the polarization of the incident wave, and more than 90% absorption can be achieved for angles of incidence up to 60° for both TE and TM polarized incident THz waves.

This paper presents the design, fabrication, and characterization of a real-time voltage-tunable terahertz metamaterial based on microelectromechanical systems and broadside-coupled split-ring resonators. In our metamaterial, the magnetic and electric interactions between the coupled resonators are modulated by a comb-drive actuator, which provides continuous lateral shifting between the coupled resonators by up to 20 µm. For these strongly coupled split-ring resonators, both a symmetric mode and an anti-symmetric mode are observed. With increasing lateral shift, the electromagnetic interactions between the split-ring resonators weaken, resulting in frequency shifting of the resonant modes. Over the entire lateral shift range, the symmetric mode blueshifts by ~60 GHz, and the anti-symmetric mode redshifts by ~50 GHz. The amplitude of the transmission at 1.03 THz is modulated by 74%; moreover, a 180° phase shift is achieved at 1.08 THz. Our tunable metamaterial device has myriad potential applications, including terahertz spatial light modulation, phase modulation, and chemical sensing. Furthermore, the scheme that we have implemented can be scaled to operate at other frequencies, thereby enabling a wide range of distinct applications.